工学院大学 · 工学部 / 工学研究科 · 教授

研究关键词oxide thin-film transistors・In2O3 semiconductors・transparent conductive films・gas-sensitive TFTs・oxygen vacancy control・p-type SnOx films・graphene field-effect transistors・carbon nanotube alignment・WSe2 oxidation・IGZO electronics

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• Fabrication of SnSO4 transparent thin-films using simultaneous oxidation and sulfurization annealing2024
• Correlation between CO2 Sensitivity and Channel-Layer Thickness in In2O3 Thin-Film Transistor Gas Sensors2024
• Optimization of post-deposition annealing conditions for p-type SnO fabrication by low-concentration hydrogen sputtering using SnO2 sputtering target2024
• InZnO TFT CO2ガスセンサーにおけるZn組成比の影響2024

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