京都大学 · 工学部・工学研究科

研究关键词plasma-induced defects・silicon substrates・cathodoluminescence・positron annihilation spectroscopy・ReRAM random number generators・3D PIC simulation・microwave ion thrusters・MOSFET charging damage・microplasma thrusters

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• Characterization of residual defects in plasma-exposed Si substrates using cathodoluminescence and positron annihilation spectroscopy2017 · 17th International Workshop on Junction Technology, IWJT 2017,
• True Random Number Generator using Current Difference based on a Fractional Stochastic Model in 40-nm Embedded ReRAM2016 · 2016 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM),
• A validation study of a 3D PIC model for a miniature microwave discharge ion thruster2014 · 50th AIAA/ASME/SAE/ASEE Joint Propulsion Conference 2014,
• High-k MOSFET Performance Degradation by Plasma Process-Induced Charging Damage2012 · 2012 IEEE INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP FINAL REPORT,

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