九州工業大学 · 工学部 / 工学研究院

研究关键词precision positioning・squeezed-air non-contact positioning・MEMS displacement sensors・straightness measurement・planar profile metrology・magnetic attraction tables・cantilever sensor arrays

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• Proceedings of ICPE2024: The 20th International Conference on Precision Engineering, 23-27 October 20242024 · 論文
• Evaluation of Fine Feed Table Positioning for Non-contact Support Based on the Squeezed-air Effect2024 · Proceedings of The 10th International Conference of Asian Society for Precision Engineering and Nanotechnology 034 2024年05月
• A MEMS device for straightness measurement integrating 10 cantilever displacement sensors2021 · Proceedings of The 10th International Conference on Leading Edge Manufacturing in 21st Century ( The Japan Society of Mechanical Engineers ) 409 - 411 2021年11月
• Consideration of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces2021 · Proceedings of The 10th International Conference on Leading Edge Manufacturing in 21st Century ( The Japan Society of Mechanical Engineers ) 640 - 645 2021年11月

• 2024年度 機械工学実験Ⅰ2024
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