名城大学 · 理工学研究科 · 教授

研究关键词表面界面物性・ワイドギャップ半導体材料・半導体工学・光電子材料・Surfaces and Interfaces Physics・光電子デバイス物性・ナノ・マイクロ加工・Electronic Materials

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• High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures2024
• Diamond NEMS Resonators for Real-Time Dual Sensing of Magnetic Fields and Temperatures up to 500°C2024
• Ultrahigh Responsivity of Diamond-based Solar-blind Photodetectors Using Hydrogen Plasma Treatment2024
• Influence of post-deposition annealing on interface characteristics at Al2O3/n-GaN2019

• Program Committee, International Conference on Diamond and Carbon Materials (ICDCM 2016),
• 極限環境用ダイヤモンドナノマシンロジック回路基盤技術の構築
• SiCに対する低抵抗オーム性電極材料開発
• International Advisery Committee, International Conference on Diamond and Carbon Materials (ICDCM 2013),

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