城西大学 · 理学部

研究关键词MEMS optical switches・three-dimensional MEMS・electrodeposited dielectric films・anti-stiction coatings・wavelength-selective switches・optical cross-connects・fingerprint sensors・electret energy harvesters

研究领域機能物性化学

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• Anti-sticking effect of organic dielectric formed by electrodeposition in microelectromechanical-system structures
• Wavelength dependence of insertion loss caused by intermodal interference
• Selective removal of dry-etching residue derived from polymer sacrificial layer for microelectromechanical-system device fabrication
• Novel structure and fabrication process for integrated RF microelectromechanical-system technology

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