早稲田大学 · 情報生産システム研究科 · 教授

研究关键词MEMS gyroscopes・micro-seismometer・low-frequency resonator・capacitive charge pump・hydrogen sensor・inertial MEMS・through-silicon DRIE・catch-and-release mechanism

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• Fabrication of low-resonant-frequency inertial MEMS using through-silicon DRIE applied to silicon-on-glass2024 · Jun Wu, Hui Zhang, Tamio Ikehashi
• A Capacitance Varying Charge Pump with Exponential Stage-Number Dependence and Its Implementation by MEMS Technology2024 · Menghan SONG, Tamio IKEHASHI
• A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer2022 · Jun Wu, Hideyuki Maekoba, Arnaud Parent, Tamio Ikehashi
• Characterization of Nonlinear Behavior of Weakly Coupled Resonators based on Nonlinearity Factor2021 · Tamio Ikehashi, Hideyuki Maekoba, Arnaud Parent

• 超低共振周波数MEMS共振器を用いた振動計の研究2021 · 日本学術振興会 科学研究費助成事業 基盤研究(C)