Chiba Institute of Technology · Faculty of Engineering · 准教授

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• Effects of Relative Velocity on Grinding Performances under Rotary Grinding of Si Wafer
• Consideration of temperatures of sipindle body and cooling fluid for designing feedback control system of themally induced spindle displacement
• Thermal Displacement Prediction of Simple Mechanical Machine Tool Spindle Model Using Machine-learning Method
• ビルトインモータスピンドルの最適冷却条件に関する研究(第1報)ビルトインモータスピンドルの温度変化シミュレーション

• 揺動機構内蔵スピンドルを有する硬脆ウエハ研削盤の開発

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