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Mitsuya MOTOHASHI

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Mitsuya MOTOHASHI本橋光也

Tokyo Denki University · Graduate School of Advanced Science and Technology · 教授

Publications: 4
Keywords: 2

留学神社

A

Basic information

Tokyo Denki University · Graduate School of Advanced Science and Technology · 教授

Research keywordsマイクロナノシリコン・グロー放電プラズマ

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B

Recent publications

ナノ構造シリコンへのH2-N2プラズマ処理効果
グロ-放電水素化アモルファスシリコン膜に及ぼすプラズマ制御用電極の影響
a-Si1-xCx:H膜における光学的および電気的特性の熱処理依存性
極低濃度 HF 水溶液を用いた陽極酸化により作製したSi 基板上酸化膜の原子結合状態

C

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