Gifu University · Faculty of Engineering

Research keywords微結晶シリコン太陽電池・ペロブスカイト太陽電池・VHF-PECVD・薄膜半導体・プラズマ気相成長

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• Photocarrier diffusion lengths of high-growth-rate microcrystalline silicon
• Study of the light-trapping effects of textured ZnO : Al/glass structure TCO for improving photocurrent of a-Si : H solar cells
• Gas-temperature control in VHFPECVD process for high-rate (>5 nm/s) growth of microcrystalline silicon thin films
• Crystallographic study of the initial growth region of mu c-Si with different preferential orientations

• 薄膜微結晶シリコン太陽電池の高速度製膜並びに高品位化
• High-rate deposition of microcrystalline silicon thin films for photovoltaic layer of solar cells
• 有機・無機ハイブリッド・ペロブスカイト半導体における光照射下電気伝導機構の解明
• プラズマ気相診断による薄膜ナノ結晶シリコン太陽電池の界面制御技術の開発

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