Kindai University · Faculty of Humanity-Oriented Science and Engineering · 教授

Research keywordsnegative ion plasma・ECR plasma・VHF plasma・plasma nitridation・microcrystalline silicon thin films・sheath voltage・supersonic gas jet plasma

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• Gas mixture ratio dependence of ion temperature in ECR plasma
• Behaviour of sheath voltage in negative ion plasma
• Effect of background pressure on deposition rate and crystallinity of deposited silicon in Non-equilibrium plasma jet CVD
• Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma

• 中性粒子風と渦の極性反転
• 低温プラズマ表面修飾技術による酸化チタン微粒子の環境浄化機能の改善に関する研究
• 狭ギャップ高圧VHFプラズマを用いた微結晶シリコン薄膜作製
• ECRプラズマ中の電子速度分布関数と成膜の再現性に関する研究

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