Kyoto Institute of Technology · Division of Electrical and Electronic Engineering · 教授

Research keywords圧電MEMS・強誘電体薄膜・触覚センシング・超音波計測・マイクロマシニング

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• Studies on control of oxygen vacancies in MOD-made BaTiO3 thin film by nitrogen annealing to improve resistive switching behavior for ReRAM application
• Studies on Curvature Deformation Control of Bilayer Cantilever Fabricated by Surface Micromachining of SOI Wafer
• Sensitivity of piezoelectric MEMS ultrasonic sensors using sol-gel PZT films prepared through various pyrolysis temperatures
• Comparison of BST Film Microwave Tunable Devices Based on (100) and (111) MgO Substrates

• 座屈制御歪み構造体上での圧電MEMSデバイスの変換効率飛躍的向上メカニズムの解明
• 強誘電体薄膜の物性制御と次世代メモリデバイスへの応用
• 圧電性半導体の光・運動変換を用いたマイクロマシンの遠隔駆動機構
• 機能性薄膜を用いたマイクロメカニカルデバイスとその応用システムに関する研究

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