Kyoto Institute of Technology · Division of Electrical and Electronic Engineering · 教授

Research keywordsミストを用いた半導体デバイス形成技術・CVD・hybrid perovskite・metastable phase materials・mist CVD・solar cells・Oxide semiconductors・酸化物薄膜・結晶成長・エピタキシャル成長

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• Mist chemical vapor deposition study of 20 and 100 nm thick undoped ferroelectric hafnium oxide films on n+-Si(100) substrates
• Film Deposition and Optical Properties of Cu-Based Metal Halide Cs3Cu2(I1–xBrx)5 Alloy via Mist Deposition
• Growth of metastable α-ga2o3 epitaxial thin film on flexible synthetic mica by insertion α-Fe2O3 buffer layer
• Fabrication of conducting poly(3,4-ethylenedioxythiophene): Poly(styrenesulfonate) thin films by ultrasonic spray-assisted mist deposition method

• 強誘電性κ-Ga2O3の超低消費電力パワーデバイスの開拓
• 強誘電性κ-Ga2O3の超低消費電力パワーデバイスの開拓
• 細胞外電子伝達菌と光半導体による高効率人工光合成への挑戦
• ビスマス含有狭バンドギャップ半金属半導体混晶の創製とフォトニックデバイスへの応用

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