Kyoto Institute of Technology · Division of Electrical and Electronic Engineering · 助教

Research keywordsWide bandgap semicondoctors・Capacitance transient spectroscopy・ワイドバンドギャップ半導体中の欠陥評価・Defects

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• Homoepitaxial growth of Ge doped β-gallium oxide thin films by mist chemical vapor deposition
• The deposition and the optical characteristics of Cu-based metal halide Cs3Cu2I5 thin film via mist deposition
• Depth profiles of electron traps generated during reactive ion etching in n-type 4H-SiC characterized by using isothermal capacitance transient spectroscopy
• Demonstration of Bixbyite-Structured δ-Ga2O3Thin Films Using β-Fe2O3Buffer Layers by Mist Chemical Vapor Deposition

• β-及びκ-酸化ガリウム中の深い準位の定量と結晶成長における制御
• ミスト化学気相成長β-酸化ガリウム層中の欠陥準位の定量
• 超低損失パワーデバイス実現に向けた窒化ガリウム中の深い準位の生成メカニズムの解明
• 電子デバイス応用に向けた絶縁体/酸化ガリウム界面欠陥の定量と制御

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