Kogakuin University · Faculty of Engineering / Graduate School of Engineering · 教授

Research keywords発光デバイス・ワイドギャップ窒化物・酸化物半導体・光物性工学・電子デバイス・ワイドギャップ窒化物半導体・ワイドギャップ酸化物半導体・結晶成長・MBE

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• Deposition of ZnO and Al-doped ZnO thin films using pressed-sintered targets2025
• Strain-induced band-gap widening in (100) β-Ga2O3 thin films grown on θ−Al2O3 buffer layers2025
• Homoepitaxial growth of thick Si-doped β-Ga 2 O 3 layers using tetramethylsilane as a dopant source by low-pressure hot-wall metalorganic vapor phase epitaxy2025
• Realization of cathodoluminescence in the 180 nm spectral range by suppressing thermal stress in mist chemical vapor deposition of rocksalt-structured MgZnO films2024

• ワイドギャップⅢ族酸化物/窒化物半導体ヘテロ構造作製のための基盤技術開拓
• 真空紫外半導体光物性の学理創成
• 窒化物半導体表面・界面における再結合過程の解明と素子性能向上に向けた基礎研究
• 超ワイドギャップ酸化物半導体量子構造によるサブ200nm光機能の創成

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