Sojo University · Faculty of Informatics · 教授

Research keywords4H-SiC・laser doping・CO2 laser annealing・ohmic contacts・semiconductor processing・pulsed laser deposition・flexible printed circuits・thin films

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• Deep Al doping in 4H-SiC by pulse-width-modulated CO2 laser irradiation of Al2O3 films without post-annealing2026
• Relation between film transmittance and deposition conditions by pulsed laser deposition using powder targets2025
• Electroless Cu plating on poly(ethylene 2,6-naphthalate) with plasma surface modification and its application to high-frequency flexible printed circuits2025
• Ohmic Contact Formation on 4H-SiC by CO2 Laser Annealing of Metal Film on the 4H-SiC2022 · Abst. 10th International Conference on Electromagnetic Devices and Processes in Environment Protection (ELMECO-10)

• 液中レーザドーピングにおけるSiC表面温度のその場計測と不純物プロファイル制御2017
• 機能性酸化物の触媒効果を利用した炭化シリコンの低温酸化2016
• ドーピング時の発光測定を用いたSiCへのウエットケミカルレーザドープの機構解明2014
• ウェットレーザプロセッシングにおける超高速ドーピング機構の研究2013

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