Kwansei Gakuin University · Faculty of Engineering

Research keywords4H-SiC wafers・sub-surface damage・laser light scattering・wafer planarization・dynamic thermal annealing・non-destructive quantification・epitaxial defects

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• 出版年月：論文
• 吉田 雅洋, 大和田 謙二, 金子 忠昭, 久津間 保徳, 堂島 大地, 青山 拓志, 水木 純一郎論文
• Suppression of In-Grown SF Formation and BPD Propagation in 4H-Sic Epitaxial Layer by Sublimating Sub-Surface Damage before the Growth”論文
• SPring-8/SACLA利用研究成果集論文

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