Kyoto University · Faculty of Engineering / Graduate School of Engineering · 准教授

Research keywords真空ナノエレクトロニクス・電界放出・イオンビーム・薄膜・フィールドエミッタ

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• Evaluation of Ge Oxidation State in Ge Nanoparticles Formed in Thin SiO2 Layer by Negative-Ion Implantation and Successive Two-Stage Annealing2016 · Transactions of the Materials Research Society of Japan
• Neutralization of space charge in magnetic field by electrons supplied from silicon based field emitter arrays2012 · ION IMPLANTATION TECHNOLOGY 2012,
• Neutralization of Space Charge on High-Current Low-Energy Ion Beam by Low-Energy Electrons Supplied from Silicon Based Field Emitter Arrays2012 · ION IMPLANTATION TECHNOLOGY 2012,
• Optimization of Compact Microwave Ion Source for Generation of High Current and Low Energy Ion Beam2010 · ION IMPLANTATION TECHNOLOGY 2010,

• 電界放出素子のその場特性評価装置の開発と素子特性ゆらぎの要因解析
• 針状試料を用いる必要のない新しい3次元アトムプローブの原理検証
• 金サマリウム合金の薄膜物性と電子放出特性に関する研究
• カーボンナノチューブの超精密位置・成長制御によるナノ構造デバイスの研究

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