Public Professor Archive
Kyushu Institute of Technology · Faculty of Computer Science and Systems Engineering / Graduate School of Computer Science and Systems Engineering / Graduate School of Computer Science and Systems Engineering / Faculty of Computer Science and Systems Engineering · 准教授
Kyushu Institute of Technology · Faculty of Computer Science and Systems Engineering / Graduate School of Computer Science and Systems Engineering / Graduate School of Computer Science and Systems Engineering / Faculty of Computer Science and Systems Engineering · 准教授
Research keywordsmicrofabrication・MEMS・microdevices・microelectromechanical system (MEMS)・表面特性の制御・微細加工技術・マイクロデバイス・modification of solid surfaces
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