Kyushu Institute of Technology · Faculty of Computer Science and Systems Engineering / Graduate School of Computer Science and Systems Engineering / Graduate School of Computer Science and Systems Engineering / Faculty of Computer Science and Systems Engineering · 准教授

Research keywords化学的機械研磨・ナノスケール可視化・Chemical Mechanical Polishing・Optical Applied Measurement・Visualization in Nanoscale・光応用計測

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• 半導体製造プロセスを支える洗浄・クリーン化・汚染制御技術2022 · サイエンス＆テクノロジー 2022年11月 （ ISBN: 978-4864282949 ）
• Absolute longitudinal distance measurement verification of a standard polystyrene nanoparticle near a surface in water by means of multi-wavelength evanescent field2022 · European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022 385 - 388 2022年01月
• Proposal of a novel peeling of nano-particle (PNP) process for localized material removal on a hard material surface by controllable magnetic fields2022 · European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022 279 - 280 2022年01月
• Brownian motion simulation of SiO2 abrasive nanoparticle on SiC substrate surface2021 · 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 353 - 357 2021年01月

• MAPT2025 MAPT2025@Sapporo 実行委員（国際会議）2025 · 2024年08月 - 2025年03月
• 日本機械学会 生産加工・工作機械部門 LEM21 実行委員（国際会議）2025 · 2025年12月
• 2024年度 光応用ナノスケール計測特論AM2024
• 2024年度 知的システム工学実験演習Ⅲ2024

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