Kyushu Institute of Technology · Faculty of Computer Science and Systems Engineering / Graduate School of Computer Science and Systems Engineering / Graduate School of Computer Science and Systems Engineering / Faculty of Computer Science and Systems Engineering · 教授

Research keywordsMaterial Science・化学的機械的研磨・先進加工・材料科学・Advenced Machening・Chemical Mechanical Polishing(CMP)・CMP・化学機械研磨・ナノ粒子・動的光散乱

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• Absolute longitudinal distance measurement verification of a standard polystyrene nanoparticle near a surface in water by means of multi-wavelength evanescent field2022 · European Society for Precision Engineering and Nanotechnology Conference Proceedings 22nd International Conference and Exhibition Euspen 2022 385 - 388 2022年01月
• Study on material removal mechanism for Cu-CMP on a patterned silicon wafer2021 · 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 243 - 245 2021年01月
• Investigation on the Abrasive Phenomenon of Colloidal SiO2 Particles and Water-soluble C60 Inclusion Complex Particles in the CMP Process of the 4H-SiC Substrate Wafer2021 · 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 248 - 251 2021年01月
• Brownian motion simulation of SiO2 abrasive nanoparticle on SiC substrate surface2021 · 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 353 - 357 2021年01月

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