Hiroki Shimizu清水浩貴

Kyushu Institute of Technology · Faculty of Engineering / Institute of Engineering · 准教授

留学神社

Basic information

Kyushu Institute of Technology · Faculty of Engineering / Institute of Engineering · 准教授

Research keywords計測工学・MEMS変位センサ・多点法・平面度測定・自己校正法・表面形状計測

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日本機械学会2025年度年次大会講演論文集2025 · 論文
A MEMS device for straightness measurement integrating 10 cantilever displacement sensors2021 · 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 409 - 411 2021年11月
Consideration of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces2021 · 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 640 - 645 2021年11月
High sensitivity MEMS displacement sensor device for planar shape measurement by deposition of piezoelectric materials2019 · Proceedings of 8th International Conference of Asian Society for Precision Engineering and Nanotechnology ( Asian Society for Precision Engineering and Nanotechnology ) C13 2019年11月

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