Nagoya Institute of Technology · Unclassified · 教授

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• Electrical properties of GaN-based metal-insulator-semiconductor structures with Al2O3 deposited by atomic layer deposition using water and ozone as the oxygen precursors
• Self-forming graphene/Ni patterns on sapphire utilizing the pattern-controlled catalyst metal agglomeration technique
• Demonstration of NOx gas sensing for Pd/ZnO/GaN heterojunction diodes
• Influence of Annealing Method on Microscopic One-to-One Correlation between Threshold Voltage of GaAs MESFET and Dislocation

• 省エネ用縦型GaN/Siパワーデバイスに関する基盤技術開発
• シリコン基板上へテロエピタシキャシャル成長及びデバイスへの応用
• 窒化物半導体を用いた光電子素子

• Official profile