Ritsumeikan University · Faculty of Science and Engineering / Graduate School of Science and Engineering · 教授

Research keywordshelium ion microscopy・silicon nanosheets・4H-SiC・GaN single crystals・THz spectroscopic ellipsometry・threading dislocations・ion implantation

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• Nanoscale direct patterning in ultrathin silicon nanosheets utilizing helium ion microscopy │ Japanese Journal of Applied Physics │2025
• Noncontact and nondestructive measurements of electrical properties for Mg ion-implanted layers on GaN single crystals using THz time-domain spectroscopic ellipsometry │ MRS Advances │2025
• 3D structure of threading screw dislocation at a deep location in 4H-SiC using 3D micro-X-ray topography │ Japanese Journal of Applied Physics │2024
• Effect of carbon coating on surface structure in annealing process of high-dose implanted/annealed SiC │ Journal of Applied Physics │2024

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