Shimane University · Faculty of Science and Engineering / Graduate School of Science and Engineering · 准教授

Research keywordsレーザー結晶化・薄膜トランジスタ・太陽電池・薄膜・単結晶薄膜・半導体

Research fields電子デバイス、電子機器

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• Light-absorptive underlayer-enhanced superlateral growth in Excimer laser crystallization of amorphous silicon film
• Fabrication of poly-Si complementary metal oxide semiconductor inverter by all sputtering deposition process
• Chemical Vapor Deposition of Nickel Oxide Films from Bis-π-Cyclopentadienyl-Nickel
• Fabrication of single crystalline stripe in Si and Ge film on rolled flexible glass substrate by UV cw micro-chevron laser beam

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