Shizuoka University · Faculty of Engineering · 助教

Research keywordsdiamond-like carbon・plasma-enhanced chemical vapor deposition・field emitter arrays・carbon nanotubes・electron emission・triode DC-PECVD・nanostructured carbon films・low work function materials

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• Nanostructured field emitter arrays by Transfer Mold Method
• Stable Emission Characteristics of Nanometer-order Size Transfer Mold Field Emitter Arrays with In-situ Radical Treatment
• Controlled density of vertically aligned carbon nanotubes in a triode plasma chemical vapor deposition system
• Suitability of low-work-function titanium nitride coated transfer mold field-emitter arrays for harsh environment

• ナノ構造電子源を用いた超高分解能マイクロフォーカスエックス線源に関する研究
• 大面積から小面積まで可変の紫外光発生高気圧面生成プラズマ源の研究

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