Tokyo City University · Graduate School of Science and Engineering · 教授

Research keywordsナノデバイス信頼性工学・薄膜固体物性・ナノエレクトロニクス・電子デバイス・不揮発性メモリ・デバイス信頼性

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• Evaluation of the effect of hydrogen plasma treatment on the chemical bonding state and distribution of hydrogen in silicon nitride films by angle-resolved hard X-ray photoelectron spectroscopy2025 · Japanese Journal of Applied Physics
• Split weight distribution learning for binary neural networks exploiting nano-memristive graphene/sumanene/graphene devices2025 · Japanese Journal of Applied Physics
• Study on the relation between interface trap creation and MOSFET degradation under channel hot carrier stressing at cryogenic temperatures2024 · Japanese Journal of Applied Physics
• Effects of plasma oxidation and plasma nitridation on chemical bonding state of AlScN evaluated by AR-HAXPES2024 · Japanese Journal of Applied Physics

• 原子状水素を用いたシリコン窒化薄膜のナノ欠陥制御と信頼性向上に関する研究2022 · 日本学術振興会
• マイクロ波励起プラズマ処理によるシリコン窒化膜中水素濃度分布制御と電圧駆動型固体素子ニューロンの開発2022 · 国立研究開発法人科学技術振興機構
• 趙微粒子制御クリーニング基礎技術1999 · 技術研究組合 超先端電子技術開発機構

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