Teikyo University of Science · Faculty of Life and Environmental Sciences · 教授

Research keywords薄膜トランジスタ・LSI・Si/Geヘテロ界面・CIGS Solar cell・Low-K Insulating Films・Thin film devices・体調変化検出システム・圧力センサ・太陽電池・機械学習

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• Parallel-to-serial transformation by using large-cell-size amorphous-silicon charge-coupled devices
• Low-temperature chemical-vapor-deposition of silicon nitride from tetrasilane and hydrogen azide
• Self-alignment a-Si FET by using a lift-off technique
• Metal-induced low-temperature crystallization of electrodeposited Ge thin film

• CIGS太陽電池
• リハビリテーションにおける活動測定デジタル機器の技術受容体制構築
• Study on Low-k insulating films
• Si/Ge歪み制御原子層超格子の研究

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