Ryugaku Jinja · Professor Archive
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Masaaki Moriyama森山 雅昭
Tohoku University · Center for Microelectronic Systems · 准教授
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- 4
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- 4
留学
神社Tohoku University · Center for Microelectronic Systems · 准教授
Research keywordsMEMS・Wafer-Level-Packaging・MEMS Fabrication・PZT
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- Low-stress epitaxial polysilicon process for micromirror devices2013 · 電気学会論文誌E 133 (6) 223-228 2013年
- MEMS research is better togetherKentaro Totsu, Masaaki Moriyama, Masayoshi Esashi
- 東北大学試作コインランドリ～MEMS の試作開発から製品化に至る一貫した支援拠点～戸津 健太郎, 森山 雅昭, 鈴木 裕輝夫, 江刺 正喜
- Hands-on-access fabrication facility for MEMS Development and productionKentaro Totsu, Masaaki Moriyama, Yukio Suzuki, Takahito Ono, Shinya Yoshida, Masayoshi Esashi
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