Tohoku University · Faculty of Engineering / Graduate School of Engineering · 助教

Research keywords圧電薄膜デバイス・MEMS・抵抗センサー・電気電子・機械・材料工学・Microelectromechanical・systems・Actuator

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• 位置制御のための埋め込みピエゾ抵抗を備えた圧電マイクロミラー2021 · 日本機械学会第12回マイクロ・ナノ工学シンポジウム MN2-09A3-2 2021年11月
• Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position controlAndrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka
• Irreversible Membrane Deformation and Other Defects in Silicon-on-Nothing Structures: Experimental Insights and Cavity Pressure CharacterizationZhengnan Tang, Andrea Vergara, Shuji Tanaka
• Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistorsAndrea Vergara, Takashiro Tsukamoto, Weileun Fang, Shuji Tanaka

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