Institute of Science Tokyo · School of Engineering · 特任教授

Research keywordsシリコンフォトニクス・リング共振器・位相誤差・光集積回路・誘電緩和・grain size effects・hafnium aluminate・hafnium oxide・hafnium silicate・random telegraph noise

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• Siフォトニクス技術を用いた超小型光トランシーバ『光I/Oコア』の開発
• Conformal Step Coverage of (Ba,Sr)TiO_3 Films Prepared by Liquid Source CVD Using Ti(t-BuO)_2(DPM)_2
• Precise waveguide loss extraction using 300-mm wafer-level OFDR for optical process control monitoring
• Two-dimensional void growth during thermal decomposition of thin HfO2 films on Si

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