Tokyo University of Science · Faculty of Advanced Engineering · 教授

Research keywordsナノインプリント技術，三次元ナノ構造作製，電子ビーム露光技術・ナノインプリント・三次元ナノ構造・電子ビーム露光・離型剤・UV-NIL・モールド技術

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• Development and optimization of water treatment reactors using TiO2-modified polymer beads with a refractive index identical to that of water
• Fabrication of eight-step diffractive optical element for hologram-ROM
• Improvement of transfer durability of a pillar-shaped release-agent-free replica mold in ultraviolet nanoimprint lithography
• Thermal Desorption Development of Spin-On Glass for Electron Beam Nanolithography

• 三次元ナノインプリント技術に関する研究
• Study of three-dimensional nanoimprint technology

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• ORCID