Toyohashi University of Technology · Division of Electronics and Information Engineering · 特定教授

Research keywords3次元集積化・A/D変換回路・CMOS・MEMS・SOI・VLSI・イメージセンサ・ウェハ接合

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• 軟X線照射によるシリコンマイクロホン用エレクトレットの作製
• Three-Layered Stacking Process By Au/SiO2 Hybrid Bonding for 3D Structured Image Sensors
• Pixel-Parallel 3-D Integrated CMOS Image Sensors With Pulse Frequency Modulation A/D Converters Developed by Direct Bonding of SOI Layers
• 無機エレクトレットを用いた電荷蓄積型シリコンマイクロホン

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