The University of Tokyo · Graduate School of Engineering / Faculty of Engineering · 教授

Research keywordsセンサネットワーク・電気電子・機械・材料工学・無線センサノード MEMS 実装技術・センサ

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• Plastic-scale-model assembly of ultrathin film MEMS piezoresistive strain sensor with conventional vacuum-suction chip mounter
• Room-temperature pressureless wafer-scale hermetic sealing in air and vacuum using surface activated bonding with ultrathin Au films
• Non-Contact Heart Sound Measurement Using Independent Component Analysis
• Cantilever structure placed in liquid sandwiched between soft-thin membranes to realize wide bandwidth harvester

• 安全・安心のためのアニマルウォッチセンサの開発2006

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