The University of Tokyo · Institute of Industrial Science · 特任助教

Research keywordsMEMS probes・liquid cell TEM・UV-PDMS photolithography・mechanical metamaterials・single-cell capture・in situ TEM

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• Microfabricated double-tilt apparatus for transmission electron microscope imaging of atomic force microscope probe2024
• Near-zero Poisson's Ratio and Large-area Metamaterial Made of UV-PDMS Using Three-dimensional Backside Exposure2024
• UV-curable Polydimethylsiloxane Photolithography and Its Application to Flexible Mechanical Metamaterials2023
• Fabricating Silicon Resonators for Analysing Biological Samples2021

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