Wakayama University · Faculty of Systems Engineering · 教授

Research keywords酸化ガリウム・ミストCVD法・光デバイス・化合物半導体・半導体ナノ構造・結晶成長・酸化物半導体

Research fields酸化物半導体, ミストCVD法, 酸化ガリウム・電気電子材料工学

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• 紫外線照射して親水化した水晶基板上にミストCVD法によって成長した酸化ガリウム薄膜2025 · 宇野和行, 尾友響 (担当区分： 筆頭著者, 責任著者 )
• 深紫外光検出器を目指した酸化ガリウム薄膜の水晶基板上ミストCVD成長2024 · 宇野和行, 田中一成, 尾友響 (担当区分： 筆頭著者, 責任著者 )
• Improvement of Photoconductivity in a-Oriented α-Ga2O3 Thin Films Grown on Sapphire Substrates by Mist Chemical Vapor Deposition2024 · Kazuyuki Uno, Keishi Yamaoka (担当区分： 筆頭著者, 責任著者 )
• Control of Al composition of mist chemical vapor deposition grown α-(AlGa)2O3 alloy thin films by acetylacetonation of Al ion2023 · Abstract We investigated the dominant factors affecting the Al composition of α-(AlGa)₂O₃ alloy thin films in mist chemical vapor deposition, focusing on the acetylacetonation of the source solutions. The Al acetylacetonate (acac) complex formation time was evaluated using Fourier-transform infrared spectroscopy to examine the effectiveness of heating during stirring of the source solutions. Then, α-(AlGa)₂O₃ alloy thin films were grown in source solutions in which the state of the acac complex was changed by adding ammonia water and/or hydrochloric acid, and the Al composition increased with increasing the pH value due to acceleration of acetylacetonation. The growth-temperature dependence of the Al composition was also experimentally investigated. The Al composition decreased with increasing growth temperature. The reasons are due to the strength of Al–O bond or dissociation of Al–acac ligand.

• ミストCVD 法によるGa2O3膜成膜の件2018
• 窒素添加半導体と有機センサ材料の融合デバイスに関する検討
• 全光通信のための光変調器用半導体材料の研究
• グラファイトおよびp 型窒化ガリウム上への電着法による酸化亜鉛のエピタキシャル成長

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