Tohoku University · Faculty of Engineering / Graduate School of Engineering · 教授

Research keywords精密ナノ計測・形状と運動の精密計測・光応用計測・精密位置決め・精密計測

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• Surface form measurement of a small roll workpieceToshiki Saito, Yuki Machida, Yuki Shimizu, Yuan Liu Chen, Wei Gao
• Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometerXin Xiong, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
• Multi-axis angle sensor based on laser autocollimationYusuke Saito, Yoshikazu Arai, Wei Gao
• A new signal processing method for a differential chromatic confocal probe with a mode-locked femtosecond laserRyo Sato, Chong Chen, Hiraku Matsukuma, Yuki Shimizu, Wei Gao

• マイクロ自由曲面創製用超精密インプロセス加工計測装置の開発2011
• ナノエッジ効果で光の回折限界分解能を超越する光学式３次元微細エッジ計測法への挑戦清水 裕樹, 高 偉
• その場波面制御で自在に操る干渉定在波によるサブμｍ級自由微細構造の大面積露光創成清水 裕樹, 高 偉
• Flatness measurement of large silicon wafers

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