Tohoku University · Faculty of Engineering / Graduate School of Engineering · 准教授

Research keywordsMEMS resonators・inertial sensors・rate-integrating gyroscopes・wireless sensing・frequency tracking・microsystems fabrication・sensor calibration

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• MAGNETIC COOLING OF A THERMALLY-ISOLATED MICROSTRUCTURETakashiro Tsukamoto, M. Esashi, S. Tanaka
• Frequency Trimming Method for a Disk Resonator Using Flexural RigidityAbdelli, H., Tsukamoto, T., Tanaka, S.
• Dynamically Balanced Out-of-Plane Resonator for Roll/Pitch Rate Integrating GyroscopeShihe Wang, Muhammad Salman Al Farisi, Takashiro Tsukamoto, Shuji Tanaka
• Tailoring material properties of electrochemically deposited Al film from chloroaluminate ionic liquid for microsystem technology using pulsed depositionMuhammad Salman Al Farisi, Takashiro Tsukamoto, Shuji Tanaka

• 零熱膨張ガラスの熱弾性散逸機構の解明とそのデバイス応用塚本 貴城
• 濡れ性制御技術を用いた高性能小型熱ダイオードの研究開発塚本 貴城
• MEMS技術に基づく熱スイッチ，およびそれを用いたマイクロ磁気冷凍システムの開発塚本 貴城
• 蒸発と凝縮が混在するマイクロスケール閉鎖系の伝熱特性の解明塚本 貴城

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