Nagoya University · Faculty of Engineering / Graduate School of Engineering · 准教授

Research keywordssilicon carbide thin films・heterojunction diodes・chemical vapor deposition・nanocrystalline silicon・magnetron sputtering・semiconductor characterization

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• Temperature dependences of current density-voltage and capacitance-frequency characteristics of hydrogenated nanocrystalline cubic SiC/crystalline Si heterojunction diodes2016 · Thin Solid Films 619 巻 頁： 323 - 327 2016年
• Current density-voltage and admittance characteristics of hydrogenated nanocrystalline cubic SiC/crystalline Si heterojunction diodes prepared with varying H 2 gas flow rates2015 · Solid-State Electronics 104 巻 頁： 33-38 2015年2月
• N 2 post-deposition treatment on silicon thin films with a hot-wire chemical vapor method at a low wire-temperature2011 · Thin Solid Films 519 巻 ( 14 ) 頁： 4535 – 4537 2011年5月
• Structural changes in tungsten wire and their effect on the properties of hydrogenated nanocrystalline silicon carbide thin films2011 · Thin Solid Films 519 巻 ( 14 ) 頁： 4451 – 4454 2011年5月

• ラジカル源を併用したＨＷ－ＣＶＤ技術の開発と不純物転化ナノ結晶薄膜作成への応用2007 · 2007年4月 - 2009年3月

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