Yamato University · Faculty of Science and Engineering · 教授

Research keywordsPZT thin films・chemical vapor deposition・MOCVD growth・ferroelectric materials・switching kinetics・photoenhanced deposition・single wafer CVD・thin film characterization

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• Switching Kinetics of Pb(Zr, Ti)O3 Thin Films Grown by Chemical Vapor Deposition1993
• Growth and Characterization of Ferroelectric Pb(Zr, Ti)O3 Thin Films by MOCVD Using a 6-inch Single Wafer CVD System1993
• Effects of Growth Rate on Properties of Pb(Zr, Ti)O3 Thin Films Grown by Chemical Vapor Deposition1993
• Thin Film Growth of Pb(Zr, Ti)O3 by Photoenhanced Metalorganic Chemical Vapor Deposition Using NO21993

• 高効率加工用 GaN 系高出力・高ビーム品質半導体レーザーの開発
• 高効率スポット照明用レーザ光源の開発

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