Kyoto University · Faculty of Engineering / Graduate School of Engineering

Research keywordshigh-resolution elastic recoil detection・ion beam analysis・secondary ion mass spectrometry・thin film characterization・hydrogen depth profiling・microelectronics materials

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• Antireflection coatings with FeSi2 layer: Application to spectrally selective infrared emitter2010 · ASIA-PACIFIC CONFERENCE ON SEMICONDUCTING SILICIDES SCIENCE AND TECHNOLOGY TOWARDS SUSTAINABLE OPTOELECTRONICS (APAC-SILICIDE 2010),
• Accumulation of hydrogen near the interface between ultrathin SiO2 and Si(001) under ion irradiation in high-resolution elastic recoil detectionNUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
• Bottom-up Process to Fabricate Periodic Arrays of -FeSi2 Nanopillars for Photonic ApplicationsECS Transactions,
• Secondary electron emission from SnTe(001) and KCl(001) surfaces induced by specularly reflected protonsAPPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, PTS 1 AND 2,

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