佐道泰造佐道泰造

Kyushu University · Graduate School of Mathematics for Innovation

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Kyushu University · Graduate School of Mathematics for Innovation

Research keywordsGe薄膜・SnドープGe・GeSnオンインシュレータ・固相結晶化・エキシマレーザドーピング・薄膜トランジスタ・層交換結晶化・低温半導体プロセス・InSb薄膜・ショットキー障壁制御

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Solid State Devices and Materials 2023 (SSDM2023)2024 · JAPANESE JOURNAL OF APPLIED PHYSICS 63 ( 2 ) 2024年2月（ ISSN: 0021-4922 eISSN: 1347-4065 ）
Excimer Laser Doping for PN Junction Formation with Extremely Low Thermal Budget2023 · 30th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2023 - Proceedings 159 - 160 2023年（ ISBN: 9784991216947 ）
Sn-Doped Si Thin-Films on Insulator by Solid-Phase Crystallization2023 · 30th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2023 - Proceedings 157 - 158 2023年（ ISBN: 9784991216947 ）
Grain Enlargement of Ultrathin Si Films on Insulators by Sn-Doping2023 · Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials - 871 - 872 2023年

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