Kyushu Institute of Technology · Faculty of Engineering / Institute of Engineering

Research keywordsdiamond thin films・atomic hydrogen surface cleaning・hot wire chemical vapor deposition・SiCN films・interconnect cleaning・oxide reduction on metals・film corrosion resistance

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• Estimation of hydrogen radical density generated from various kinds of catalysts2009 · Thin Solid Films 517 3449 - 3451 2009年04月
• Improvement in flip-chip bonding by reduction of oxides using hydrogen radicals2009 · Proceedings - 2009 International Symposium on Microelectronics, IMAPS 2009 1028 - 1031 2009年12月
• A novel copper interconnection cleaning by atomic hydrogen using diluted hydrogen gas2009 · Solid state Phenomena 145-146 389 - 392 2009年04月
• Novel materials for electronic devaice fabrication using ink-jet printing technology2009 · Applied Surface Science 256 1019 - 1022 2009年04月

• 半導体の秘密-集積回路の中身と作り方-2024 · 九州工業大学 佐賀県立佐賀北高等学校 2024年10月22日
• 2024年度 電気回路Ⅰ2024
• 2024年度 電気電子工学ＰＢＬ実験2024
• 2024年度 集積回路プロセス特論2024

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