Tohoku University · Center for Microelectronic Systems

Research keywordsMEMS-LSI integration・through-silicon vias・CMOS-MEMS fabrication・tactile sensors・wafer-level bonding・vapor HF etching・direct Si-SiO2 bonding・open-access MEMS foundry

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• PZT MEMS TUNABLE LIQUID LENS WITH INTEGRATED PIEZORESISTIVE POSITION SENSORZhengnan Tang, Leo Soda, Taiyu Okatani, Andrea Vergara, Yukio Suzuki, Shuji Tanaka
• Development of silicon wafer packaging technology for deep UV LEDHirofumi Chiba, Yukio Suzuki, Yoshiaki Yasuda, Mitsuyasu Kumagai, Takaaki Koyama, Shuji Tanaka
• Fully-integrated, fully-differential 3-axis tactile sensor on platform LSI with TSV-based surface-mountable structureYoshiyuki Hata, Yukio Suzuki, Masanori Muroyama, Takahiro Nakayama, Yutaka Nonomura, Rakesh Chand, Hideki Hirano, Yoshiteru Omura, Motohiro Fujiyoshi, Shuji Tanaka
• 試作コインランドリにおけるプロセス開発と試作支援 (特集 マイクロシステム融合研究開発)戸津 健太郎, 森山 雅昭, 鈴木 裕輝夫

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